Patent Assignment
Reel/Frame 013435/0684
Assignment of Assignor's Interest
Recorded: 2002-10-29
Received: 2002-11-01
Pages: 3
Assignors
HIRAOKA, NAOKI
Executed: 2002-09-09
OSUDA, HIROSHI
Executed: 2002-09-09
YAMAMOTO, HOTAKA
Executed: 2002-09-09
Assignee
FUJITSU VLSI LIMITED
1844-2, KOZOJI-CHO 2 CHOME, KASUGAI-SHI, AICHI 487-0013, JPX, JAPAN
Covered Property
(1)
Chemical Solution Feeding Apparatus and Method for Preparing Slurry
Application:
10/282,116 →