Patent Assignment
Reel/Frame 013464/0449
Assignment of Assignor's Interest
Recorded: 2002-11-12
Pages: 3
Assignors
TZU, SAN-DE
Executed: 2002-01-31
CHIU, CHING SHIUN
Executed: 2002-01-31
CHOU, WEI-ZEN
Executed: 2002-01-31
WU, CHIA FANG
Executed: 2002-01-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
121 PARK AVE. 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Radiation Correction Method for Electron Beam Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.