Patent Assignment
Reel/Frame 013513/0559
Assignment of Assignor's Interest
Recorded: 2002-11-18
Pages: 2
Assignors
TSURUMA, ISAO
Executed: 2002-11-12
NAYA, MASAYUKI
Executed: 2002-11-12
MUKAI, ATSUSHI
Executed: 2002-11-12
Assignee
FUJI PHOTO FILM CO., LTD.
210, NAKANUMA, MINAMI ASHIGARA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Mask for proximity field optical exposure, exposure apparatus and method therefor
Application:
10/295,893 →
Publication:
US 2003/0103195