Patent Assignment
Reel/Frame 013518/0090
Corrective Assignment to Correct Assignee Name, Previously Recorded at Reel/Frame 013224/0375 (Assignment of Assignor's Interest)
Recorded: 2002-11-18
Pages: 3
Assignee
STEAG MICROTECH GMBH
CARL-BENZ-STRASSE 10, D-72124 PFLIEZHAUSEN, GERMANY
Covered Property
(1)
Apparatus and method for the treatment of substrates
Application:
10/168,354 →
Publication:
US 2002/0189651
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.