Merger

Recorded: 2002-11-18 Received: 2002-12-05 Pages: 4

Assignors

SILICON VALLEY GROUP

Executed: 2000-12-29

THERMAL SYSTEMS LLC

Executed: 2000-12-29

Assignee

SILICON VALLEY GROUP, INC.

440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CA, 95066, UNITED STATES

Covered Property (1)

Single Body Injector and Deposition Chamber

Application: 09/757,542 →