Patent Assignment
Reel/Frame 013539/0614
Assignment of Assignor's Interest
Recorded: 2002-12-03
Pages: 4
Assignors
RYLOV, GERMAN E.
Executed: 2002-11-12
HOFMANN, THOMAS
Executed: 2002-11-11
SANDSTROM, RICHARD L.
Executed: 2002-11-14
Assignee
CYMER, INC.
LEGAL DEPT. MS/1-2A, 16750 VIA DEL CAMPO COURT, SAN DIEGO, CALIFORNIA, 92127-1712
Covered Property
(1)
Two Chamber F2 Laser System with F2 Pressure Based Line Selection