Patent Assignment
Reel/Frame 013551/0561
Assignment of Assignor's Interest
Recorded: 2002-10-11
Pages: 2
Assignors
KOMIYA, TARO
Executed: 2002-07-11
OSADA, HATSUO
Executed: 2002-07-11
HOSAKA, SHIGETOSHI
Executed: 2002-07-11
YONENAGA, TOMIHIRO
Executed: 2002-07-11
TOMOYASU, MASAYUKI
Executed: 2002-07-11
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Baffle Plate, Apparatus for Producing the Same, Method of Producing the Same, and Gas Processing Apparatus Containing Baffle Plate