Patent Assignment
Reel/Frame 013626/0913
Assignment of Assignor's Interest
Recorded: 2002-12-19
Pages: 5
Assignors
PAN, WEI
Executed: 2002-12-19
EVANS, DAVID R.
Executed: 2002-12-19
HSU, SHEN TENG
Executed: 2002-12-19
Assignee
SHARP LABORATORIES OF AMERICA, INC.
5750 NW PACIFIC RIM BLVD., CAMAS, WASHINGTON, 98607
Covered Property
(1)
Source Alternating Mocvd Processes to Deposit Tungsten Nitride Thin Films as Barrier Layers for Mocvd Copper Interconnects
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.