Patent Assignment
Reel/Frame 013627/0694
Confirmatory License
Recorded: 2003-01-03
Received: 2003-01-08
Pages: 3
Assignor
SANDIA CORPORATION
Executed: 2001-10-01
Assignee
ENERGY, U.S. DEPARTMENT OF
1000 INDEPENDENCE AVENUE, S.W., WASHINGTON, DC, 20585-0162, UNITED STATES
Covered Property
(1)
Multiple Wavelength Photolithography for Preparing Multilayer Microstructures
Application:
09/799,744 →