Patent Assignment
Reel/Frame 013666/0647
Assignment of Assignor's Interest
Recorded: 2003-01-13
Received: 2003-01-22
Pages: 3
Assignors
LI, LIHUA
Executed: 2002-12-13
XIA, LI-QUN
Executed: 2002-12-13
HUANG, TZU-FANG
Executed: 2003-01-13
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPARTMENT-M/S 2061, SANTA CLARA, CA, 95052, UNITED STATES
Covered Property
(1)
Method and apparatus to improve cracking thresholds and mechanical properties of low-k dielectric material
Application:
10/342,085 →