Patent Assignment
Reel/Frame 013792/0705
Assignment of Assignor's Interest
Recorded: 2003-02-27
Pages: 4
Assignors
OHMI, TADAHIRO
Executed: 2003-01-15
HIRAYAMA, MASAKI
Executed: 2003-01-15
TAKANO, HARUYUKI
Executed: 2003-01-15
HIRAYAMA, YUSUKE
Executed: 2003-01-15
Assignees
TADAHIRO OHMI
1-17-301, KOMEGABUKURO 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI-KEN 980-0813, JAPAN
TOKYO ELECTRON LIMITED
3 6, AKASAKA 5-CHOME, MINATO KU, TOKYO 107-0052, JAPAN
Covered Property
(1)
Plasma Etching Device