Patent Assignment
Reel/Frame 013822/0092
Assignment of Assignor's Interest
Recorded: 2003-02-26
Received: 2003-03-12
Pages: 2
Assignor
WEBER, ULRICH
Executed: 2003-01-23
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, DEX, D-73447, GERMANY
Covered Property
(1)
Objective, in Particular a Projection Lens for Microlithography
Application:
10/375,320 →