Patent Assignment
Reel/Frame 013845/0799
Assignment of Assignor's Interest
Recorded: 2003-03-05
Received: 2003-03-19
Pages: 5
Assignor
NEC CORPORATION
Executed: 2002-11-01
Assignee
NEC ELECTRONIC CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JPX, JAPAN
Covered Properties
(4)
Apparatus for applying cleaning treatment to the surface of a processed member
Application:
10/096,017 →
Chemical Mechanical Polishing Slurry
Application:
09/990,224 →
Slurry for Chemical Mechanical Polishing
Application:
09/989,016 →
Slurry for Chemical Mechanical Polishing
Application:
09/989,218 →