Patent Assignment
Reel/Frame 013882/0650
Assignment of Assignor's Interest
Recorded: 2003-03-24
Received: 2003-03-28
Pages: 4
Assignor
ZYGO CORPORATION
Executed: 2003-02-27
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Property
(1)
Pellicle Mounting Apparatus
Application:
09/788,034 →