Patent Assignment
Reel/Frame 013982/0278
Assignment of Assignor's Interest
Recorded: 2003-04-17
Pages: 2
Assignor
KUBO, AKIRA
Executed: 2003-04-17
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Method of Cleaning Damascene Structure of Semiconductor Wafer During Fabrication of Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.