Patent Assignment
Reel/Frame 014004/0875
Assignment of Assignor's Interest
Recorded: 2003-04-23
Pages: 3
Assignor
GOSHI, GENTARO
Executed: 2003-04-17
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method