Patent Assignment
Reel/Frame 014018/0363
Assignment of Assignor's Interest
Recorded: 2003-05-05
Received: 2003-05-06
Pages: 5
Assignee
BOC GROUP, INC., THE
575 MOUNTAIN AVENUE, MURRAY HILL, NEW PROVIDENCE, NJ, 07974, UNITED STATES
Covered Property
(1)
Vacuum chamber load lock purging method and apparatus
Application:
10/322,211 →