Assignment of Assignor's Interest

Recorded: 2003-05-06 Received: 2003-05-08 Pages: 9

Assignor

VOYAN TECHNOLOGY

Executed: 2003-04-24

Assignee

TOKYO ELECTRON LIMITED

2-3 (FUJI BLDG), MARUNOUOUCHI 3-CHROME, CHIYODA-KU, TOKYO, JPX, JAPAN

Covered Properties (2)

Method and system for modeling dynamic etch processes

Application: 60/406,905 →

Ramp Rate Limiter to Control Stress During Ramping

Application: 09/894,061 →