Assignment of Assignor's Interest

Recorded: 2003-05-14 Received: 2003-05-19 Pages: 4

Assignors

VON BUNAU, RUDOLF

Executed: 2003-04-06

GABER, ERWIN

Executed: 2003-04-11

GRUNER, TORALF

Executed: 2003-04-11

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STR. 22, OBERKOCHEN, DEX, D-73447, GERMANY

Covered Property (1)

Projection Exposure System

Application: 09/934,252 →