Patent Assignment
Reel/Frame 014123/0186
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2003-05-23
Received: 2003-06-05
Pages: 3
Assignors
BENVENISTE, VICTOR M.
Executed: 2003-05-21
CRISTOFORO, MICHAEL PAUL
Executed: 2003-05-21
YE, JOHN ZHENG
Executed: 2003-05-21
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Application
(1)
METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE
App. No. 10/444,413
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