Patent Assignment
Reel/Frame 014213/0541
Assignment of Assignor's Interest
Recorded: 2003-06-18
Received: 2003-07-01
Pages: 2
Assignee
SEMITOOL, INC.
655 WEST RESERVE DRIVE, KALISPELL, MT, 59901, UNITED STATES
Covered Property
(1)
Apparatus and Method for Delivering a Treatment Liquid and Ozone to Treat the Surface of a Workpiece
Application:
09/837,722 →