Patent Assignment
Reel/Frame 014247/0991
Assignment of Assignor's Interest
Recorded: 2003-06-26
Pages: 2
Assignor
BERGMAN, ERIC J.
Executed: 2003-06-19
Assignee
SEMITOOL INC.
655 WEST RESERVE DRIVE, KALISPELL, MONTANA, 59901
Covered Property
(1)
Cleaning and drying a substrate
Application:
10/608,789 →
Publication:
US 2003/0234029