Patent Assignment
Reel/Frame 014255/0963
Assignment of Assignor's Interest
Recorded: 2004-01-13
Pages: 4
Assignors
COLLINS, KENNETH S.
Executed: 2003-09-19
HANAWA, HIROJI
Executed: 2003-09-18
RAMASWAMY, KARTIK
Executed: 2003-09-18
NGUYEN, ANDREW
Executed: 2003-09-18
AL-BAYATI, AMIR
Executed: 2003-09-19
GALLO, BIAGIO
Executed: 2003-09-18
MONROY, GONZALO ANTONIO
Executed: 2003-09-18
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Immersion Ion Implantation Process Using a Capacitively Coupled Plasma Source Having Low Dissociation and Low Minimum Plasma Voltage