Patent Assignment
Reel/Frame 014284/0388
Assignment of Assignor's Interest
Recorded: 2003-07-14
Pages: 2
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Beam Exposure Apparatus and Semiconductor Device Manufacturing Method