Patent Assignment
Reel/Frame 014286/0691
Assignment of Assignor's Interest
Recorded: 2003-07-10
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Film-formation apparatus and source supplying apparatus therefor, gas concentration measuring method
Application:
10/615,926 →
Publication:
US 2004/0007180
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.