Patent Assignment
Reel/Frame 014335/0304
Assignment of Assignor's Interest
Recorded: 2003-07-28
Pages: 2
Assignors
VAN DE PASCH, ENGELBERTUS ANTONIUS FRANSISCUS
Executed: 2003-07-21
BEEMS, MARCEL HENDRIKUS MARIA
Executed: 2003-07-21
MEIJER, HENDRICUS J.M.
Executed: 2003-07-21
GALBURT, DANIEL
Executed: 2003-07-23
LOOPSTRA, ERIK ROELOF
Executed: 2003-07-21
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, 5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Position Correction in Y of Mask Object Shift Due to Z Offset and Non-Perpendicular Illumination
Patent:
6,853,440 →
Application:
10/406,602 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.