Patent Assignment
Reel/Frame 014395/0770
Assignment of Assignor's Interest
Recorded: 2003-08-04
Pages: 3
Assignors
LEE, YUN-JUNG
Executed: 2003-07-15
PARK, IN-SUNG
Executed: 2003-07-15
IM, GI-VIN
Executed: 2003-07-15
PARK, KI-YEON
Executed: 2003-07-15
YEO, JAE-HYUN
Executed: 2003-07-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Forming Oxide Layer Using Atomic Layer Deposition Method and Method of Forming Capacitor of Semiconductor Device Using the Same