Patent Assignment
Reel/Frame 014438/0528
Assignment of Assignor's Interest
Recorded: 2003-05-28
Received: 2003-09-04
Pages: 17
Assignor
PRAXAIR CMP PRODUCTS INC.
Executed: 2003-03-25
Assignee
PRAXAIR S.T. TECHNOLOGY, INC.
441 SACKETT POINT ROAD, NORTH HAVEN, CT, 06473, UNITED STATES
Covered Properties
(4)
Polishing silicon wafers
Application:
10/315,261 →
Froth and Method of Producing Froth
Application:
10/266,552 →
Controlled penetration subpads
Application:
60/386,943 →
Unsupported Chemical Mechanical Polishing Belt
Application:
10/036,624 →