Patent Assignment
Reel/Frame 014442/0639
Assignment of Assignor's Interest
Recorded: 2003-08-28
Pages: 3
Assignor
NAKAZAWA, YOSHIYUKI
Executed: 2003-06-09
Assignee
DAINOPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-KAMIKYO-KU KYOTO, JAPAN
Covered Property
(1)
Substrate Holding Device, Substrate Processing Apparatus, and Method of Releasing Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.