Patent Assignment
Reel/Frame 014452/0638
Assignment of Assignor's Interest
Recorded: 2003-08-20
Pages: 5
Assignors
ANTONI, MARTIN
Executed: 2003-06-02
SINGER, WOLFGANG
Executed: 2003-06-02
WANGLER, JOHANNES
Executed: 2003-05-26
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22,73447, OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System Particularly for Microlithography