Patent Assignment
Reel/Frame 014600/0901
Assignment of Assignor's Interest
Recorded: 2003-10-14
Pages: 2
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method of Measuring Aberration in an Optical Imaging System
Patent:
6,897,947 →
Application:
10/683,275 →