Patent Assignment
Reel/Frame 014689/0664
Change of Name
Recorded: 2003-11-07
Pages: 10
Assignor
ASM LITHOGRAPHY B.V.
Executed: 2002-01-25
Assignee
ASML NETHERLANDS B.V.
DE RUNE 1110, 5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Projection Apparatus, a Method for Determining a Position of a Substrate Alignment Mark, a Device Manufacturing Method and Device Manufactured Thereby
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.