Assignment of Assignor's Interest

Recorded: 2004-07-14 Received: 2004-07-14 Pages: 4

Assignor

Executed: 2004-06-30

Assignee

CARL-ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, DEX, 73447, GERMANY

Covered Properties (4)

Projection Exposure Device

Application: 09/945,363 →

Mos Integrated Circuit with Reduced on Resistance

Application: 09/899,332 →

Optical Arrangement

Application: 09/755,423 →

Optical System

Application: 09/755,401 →