Patent Assignment
Reel/Frame 014884/0058
Assignment of Assignor's Interest
Recorded: 2004-01-09
Pages: 3
Assignor
SHORTT, DAVID W.
Executed: 2004-01-08
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and Apparatus for Determining Surface Layer Thickness Using Continuous Multi-Wavelength Surface Scanning