Patent Assignment
Reel/Frame 014887/0630
Assignment of Assignor's Interest
Recorded: 2004-01-09
Pages: 9
Assignors
MAK, ALFRED W.
Executed: 2003-11-04
LEE, YUNG-HE YVETTE
Executed: 2003-11-11
BROOKS, CYNTHIA B.
Executed: 2003-12-03
BULE, MELLSA J.
Executed: 2003-11-16
SAHIN, TURGUT
Executed: 2004-01-07
DING, JIAN
Executed: 2003-11-15
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Integrated Phase Angle and Optical Critical Dimension Measurement Metrology for Feed Forward and Feedback Process Control