Patent Assignment
Reel/Frame 014889/0921
Assignment of Assignor's Interest
Recorded: 2004-01-16
Received: 2004-01-21
Pages: 2
Assignor
SENSYS INSTRUMENTS CORPORATION
Executed: 2004-01-07
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CA, 94539, UNITED STATES
Covered Properties
(2)
Method and Apparatus for Evanescent Field Measuring of Particle-Solid Separation
Application:
10/889,331 →
Spectroscopic Ellipsometer Without Rotating Components
Application:
09/956,356 →