Patent Assignment
Reel/Frame 014905/0148
Assignment of Assignor's Interest
Recorded: 2004-01-20
Pages: 3
Assignor
YANAGIDA, HISASHI
Executed: 2003-09-05
Assignee
MITSUBISHI HEAVY INDUSTRIES, LTD.
16-5, KONAN 2-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Electrostatic Chuck Support Mechanism, Support Stand Device and Plasma Processing Equipment
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.