Patent Assignment
Reel/Frame 014940/0844
Assignment of Assignor's Interest
Recorded: 2004-01-29
Pages: 4
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Beam Apparatus and Method of Manufacturing Semiconductor Device Using the Apparatus