Patent Assignment
Reel/Frame 014944/0762
Assignment of Assignor's Interest
Recorded: 2004-01-27
Pages: 5
Assignors
LEE, YOUNG-KWAN
Executed: 2004-01-16
LEE, SANG-WON
Executed: 2004-01-16
UHM, SAE-HOON
Executed: 2004-01-16
Assignee
PLASMART CO. LTD.
2326, SCHOOL OF NATURAL SCIENCE B/D KAIST, 373-1 KUSONG-DONG, YUSONG-GU, 305-701 DAEJEON, KOREA, REPUBLIC OF
Covered Property
(1)
Antenna Structure for Inductively Coupled Plasma Generator