Patent Assignment
Reel/Frame 014989/0711
Assignment of Assignor's Interest
Recorded: 2004-02-17
Pages: 2
Assignor
SUPERCRITICAL SYSTEMS, INC.
Executed: 2004-01-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA 5-CHOME, MINATU-KU, TOKYO 107-848, JAPAN
Covered Property
(1)
Fluoride in supercritical fluid for photoresist and residue removal
Application:
10/321,341 →
Publication:
US 2004/0112409
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 16, 2002
From: SCHILLING, PAUL E.
To: SUPERCRITICAL SYSTEMS INC.
Reel/Frame 013588/0263 →
Release of Security Interest in Patents, Recorded at Reel 051426, Frame 0410
Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: ON SEMICONDUCTOR CONNECTIVITY SOLUTIONS, INC., AS GRANTOR
Reel/Frame 064067/0340 →