Patent Assignment
Reel/Frame 015022/0337
Assignment of Assignor's Interest
Recorded: 2004-08-11
Pages: 4
Assignors
CHEN, HUANG-MING
Executed: 2004-01-27
CHOU, CHUN-LI
Executed: 2004-01-27
CHEN, CHAO-CHENG
Executed: 2004-01-27
TAO, HUN-JAN
Executed: 2004-01-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Method and Apparatus for Backside Polymer Reduction in Dry-Etch Process