Patent Assignment
Reel/Frame 015109/0768
Assignment of Assignor's Interest
Recorded: 2004-03-19
Pages: 3
Assignor
CAROLLO, ENZO
Executed: 2003-12-11
Assignee
STMICROELECTRONICS S.R.L.
VIA C. OLIVETTI, 2, AGRATE BRIANZA (MI), I-20041, ITALY
Covered Property
(1)
High-Density Plasma Process for Depositing a Layer of Silicon Nitride