Patent Assignment
Reel/Frame 015151/0990
Assignment of Assignor's Interest
Recorded: 2004-03-25
Pages: 3
Assignors
COSTON, SCOTT
Executed: 2004-03-15
CEBUHAR, WENCESLAO A.
Executed: 2004-03-09
HINTERSTEINER, JASON D.
Executed: 2004-03-10
Assignee
ASML HOLDING N.V.
DE RUN 6501, DR VELDHOVEN, NL-5504, NETHERLANDS
Covered Property
(1)
Illumination System and Method for Efficiently Illuminating a Pattern Generator