Assignment of Assignor's Interest

Recorded: 2004-03-31 Pages: 5

Assignors

COSTON, SCOTT D.

Executed: 2004-03-15

GUERRA, RICHARD J.

Executed: 2004-03-16

Assignee

ASML HOLDING N.V.

6501 DE RUN, NL-5504 DR VELDHOVEN, NETHERLANDS

Covered Property (1)

Illumination System and Method Allowing for Varying of Both Field Height and Pupil

Patent: 7,079,321 →

Application: 10/812,978 →

Publication: US 2005/0007677