Patent Assignment
Reel/Frame 015180/0538
Assignment of Assignor's Interest
Recorded: 2004-04-02
Pages: 3
Assignors
TANAKA, KOICHIRO
Executed: 2004-03-24
MIYAIRI, HIDEKAZU
Executed: 2004-03-22
SHOJI, HIRONOBU
Executed: 2004-03-24
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of Fabricating Semiconductor Device Utilizing Laser Irradiation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.