Patent Assignment
Reel/Frame 015184/0065
Assignment of Assignor's Interest
Recorded: 2004-04-06
Pages: 3
Assignors
SUGIYAMA, NORIKAZU
Executed: 2004-03-19
SAEGUSA, HIDEHITO
Executed: 2004-03-19
OKAYAMA, NOBUYUKI
Executed: 2004-03-19
IIMURO, SHUNICHI
Executed: 2004-03-19
IMAFUKU, KOSUKE
Executed: 2004-03-19
NAGAYAMA, NOBUYUKI
Executed: 2004-03-19
MITSUHASHI, KOUJI
Executed: 2004-03-19
NAKAYAMA, HIROYUKI
Executed: 2004-03-19
HUANG, YAHUI
Executed: 2004-03-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of processing quartz member for plasma processing device, quartz member for plasma processing device, and plasma processing device having quartz member for plasma processing device mounted thereon
Application:
10/490,105 →
Publication:
US 2004/0200804
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.