Patent Assignment
Reel/Frame 015236/0884
Assignment of Assignor's Interest
Recorded: 2004-04-20
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Beam Homogenizer, Laser Irradiation Apparatus, and Method for Manufacturing Semiconductor Device