Patent Assignment
Reel/Frame 015359/0945
Assignment of Assignor's Interest
Recorded: 2004-05-20
Pages: 2
Assignor
UKAJI, TAKAO
Executed: 2004-05-12
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, 3-CHOME, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Stage Device and Control Method Therefor, Exposure Apparatus, and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.