Patent Assignment
Reel/Frame 015368/0269
Assignment of Assignor's Interest
Recorded: 2004-05-26
Received: 2004-05-28
Pages: 13
Assignors
CHANG, SONG Y.
Executed: 2004-05-05
TAMBOLI, DNYANESH
Executed: 2004-05-05
EVANS, MARK
Executed: 2004-05-11
HYMES, STEPHEN W.
Executed: 2004-05-15
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
7201 HAMILTON BLVD., ALLENTOWN, PA, 18195, UNITED STATES
Covered Property
(1)
Composition and method used for chemical mechanical planarization of metals
Application:
10/744,285 →