Patent Assignment
Reel/Frame 015374/0477
Assignment of Assignor's Interest
Recorded: 2004-05-21
Pages: 3
Assignee
MOSEL VITELIC, INC.
NO. 19 LI HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK, HSIN CHU CITY, TAIWAN
Covered Property
(1)
Torque-Based End Point Detection Methods for Chemical Mechanical Polishing Tool Which Uses Ceria-Based Cmp Slurry to Polish to Protective Pad Layer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.